JPH02140967U - - Google Patents
Info
- Publication number
- JPH02140967U JPH02140967U JP4807289U JP4807289U JPH02140967U JP H02140967 U JPH02140967 U JP H02140967U JP 4807289 U JP4807289 U JP 4807289U JP 4807289 U JP4807289 U JP 4807289U JP H02140967 U JPH02140967 U JP H02140967U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- vapor deposition
- filament
- voltage
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807289U JPH02140967U (en]) | 1989-04-24 | 1989-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807289U JPH02140967U (en]) | 1989-04-24 | 1989-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140967U true JPH02140967U (en]) | 1990-11-26 |
Family
ID=31564562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4807289U Pending JPH02140967U (en]) | 1989-04-24 | 1989-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140967U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013535576A (ja) * | 2010-07-23 | 2013-09-12 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 真空コーティング装置および真空コーティング方法 |
-
1989
- 1989-04-24 JP JP4807289U patent/JPH02140967U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013535576A (ja) * | 2010-07-23 | 2013-09-12 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 真空コーティング装置および真空コーティング方法 |
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